The high-resolution scanning electron microscope ZEISS SUPRA 55VP features a field emission cathode (FEG: Field Emission Gun). The combination of FEG and the GEMINI column achieves high image resolution over the entire voltage range.
In addition to conventional examinations in high vacuum (HV mode), the VP mode (variable pressure) is available with pressures up to 1.33 mbar.
In the VP mode "moist" samples and materials that are electrically non-conductive or only slightly conductive can be examined, sputtering with gold, for example, is not necessary.
A secondary detector SE2, an in-lens detector and a 4-square backscatter detector are available as detectors.
Another equipment feature is the Oxford Instruments EDX unit for elemental analysis.

Resolution:

• 1.0 nm at 15 kV
• 1.7 nm at 1 kV
• 3.5 nm at 0.2 kV
• 2.0 nm at 30 kV (VP mode)

VP mode

• 2 - 133 Pascal, adjustable in 1 Pascal steps